What are the accuracy requirements that can be achieved by a domestically produced semi-automatically controlled probe table?

The global market for semiconductor test equipment will reach $5.22 billion in 2020 and $5.61 billion in 2010. With the development of semiconductor technology and the establishment of many fabs and laboratories, the market size of domestic probe station will reach RMB 1.025 billion in 2019 and RMB 1.569 billion in 2022.

With the rapid development of the semiconductor industry, the processing area of semiconductor products is shrinking exponentially and the complexity is increasing day by day. The manufacturing equipment required to produce semiconductor products requires the comprehensive use of mechanical, optical, physical, chemical and other disciplines and technologies, and is characterized by high technological barriers, high manufacturing difficulty, and high R&D investment. Probe table is an important semiconductor test equipment, in the entire semiconductor industry plays an important role in many aspects. It is one of the important equipment for wafer fabs and component packaging and testing companies. With the rapid development of automation technology, the market has a strong demand for automated probe tables. The automated probe station tester can test the electrical and optical parameters of the wafer, evaluate the process quality of the previous process according to the test results, and guide the next process.

From the global market, the semiconductor probe station equipment industry is highly concentrated, mainly dominated by foreign manufacturers, the industry shows a highly monopolized competitive pattern. Given that automatic test probe are opto-mechanical integration products, there is almost no domestic research in this area, and the market is mainly monopolized by some large foreign companies. Semiconductor invested in the production of X series semi-automatic probes in 2017 and successfully launched them on the market, successfully filling the gap in the domestic R&D and production field.

The X series semi-automatic probe table developed by SEMISHARE is a high-precision probe table, which has been successfully mass-produced and received batch orders from leading domestic companies. Its technical indicators can reach the international leading level, and some parameters are even better than the international first-tier brands. Recently, Shenzhen Institute of Metrology and Quality Inspection completed the testing of semi-automatic wafer probe table X series and issued the corresponding test report.

01X series as a probe table Chuck X Y Z Theta four-axis

1. The base plate is designed on the basis of casting to improve the stability of the movement and the weight of the base plate also improves the vibration isolation performance.

2. The motion system adopts Japanese high rigidity and high precision guide rail and silk rod; the feedback detection system adopts 0.1μm resolution scale and imported motion control card, which forms a full closed-loop feedback detection with the motor to ensure the realization of high precision and high temperature motion system.

3. The whole four-dimensional motion is designed as a compact structure with a low center of gravity to ensure that the speed can be up to 70 mm/sec and the acceleration during the motion can be increased.

4. Critical parts are treated with conductive surfaces to ensure that each position is protected from grounding.

02 high-performance sealed micro-dark chamber for effective information shielding EMI

The chamber adopts conductive processing technology to ensure that the open state of each component, to achieve the full shielding effect, reduce system noise, effective shielding of external interference, to provide low leakage current protection, to provide the best detection environment for the detection of weak electrical signals, and at the same time pay attention to the parts of the fit and assembly to ensure that the internal sealing. For some special equipments/wafers that require environmental simulation at high and low temperatures, the characteristics of the airflow can effectively prevent moisture in the air from condensing or frosting on the samples, filling the sealing chamber, and lowering the dew point of the gases in the chamber to a certain dew point.

03Industry-leading 3x zoom imaging technology

Built-in SEMISHARE patented microscope 3 zoom multi-field of view, micromanipulator triple-magnification confocal optical path system, optical 120X-2000X magnification, size of the multi-field of view at the same time display, which allows easy operation of the needle to achieve high-stability, high-definition precision positioning of the image output and high-precision measurement and dynamic monitoring.

04 self-developed software integration system, stronger compatibility.

●Support as well as semi-automatic control (can manually conduct tests, automatic analysis of tests)

●Automatic wafer calibration, automatic wafer mapping, automatic mold size measurement, automatic alignment, automatic test data can be accessed remotely

● One-key automatic calibration of the RF probe module and automatic cleaning of the needle function.

●One-key adaptive four-axis chuck accuracy calibration, support micro-pad point measurement

● Support single point test or continuous test.

● Powerful data storage capacity development as well as data information processing ability

● Can classify the BIN value of the test results and judge the device NG

● Multi-system integration function, can independently upgrade the operating system, application system and device test system.

05Marketing network covers the whole country and responds quickly to customers' needs.

SEMISHARE has established marketing service networks in Shenzhen, Hong Kong, Beijing, Shanghai and other cities, and responds to customers around the clock with a professional FAE technical team.

On-site support:

1) For customers in Shenzhen, after-sales management service staff will arrive at the customer within 4 hours for on-site

2)Customers in Guangdong Province, after-sales service staff will rush to customers for on-site within 24 hours

3) Customers outside Guangdong Province and after-sales service staff will arrive at the customer's site within 48 hours.

Compared with multinational companies, SEMISHARE has the service advantage of a localized enterprise, which can directly face the end customers. The technical, after-sales and sales team covering the whole network can be responsible for end-user development, customer training, product demand customization, after-sales maintenance and other issues to serve customers more effectively. We focus on the market, pay more attention to the needs of each customer, and strive to ensure that the customer's time and input-output maximization.

In the future, as the domestic semiconductor industry enters into an intensive construction period, domestic enterprises will increase R&D driven by national policies and market demand. china is expected to accelerate the localization and integration of integrated circuits, and gradually realize the substitution from low-end to high-end, thus reducing the import of integrated circuits, and breaking the situation of high dependence on foreign countries.

SEMISHARE from the beginning of its inception, has been "China's core - take off the dream - to help realize China's traditional manufacturing companies to learn independently of the leading chip, to promote the economy of the global semiconductor industry as a whole social development" as a mission, rooted in the DNA of the enterprise, adhere to the students of independent management of technological research and development products and innovation, aimed at By promoting the development of China's semiconductor test system equipment localization. The future will not forget the original intention, and strive to move forward, semiconductor localization is no longer an idealized conception, but the need for our generation can foresee the future!

semi-automatically controlled probe table semiconductor industry

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